尼康宣布推出采用世界最高数值孔径镜头的新系统
尼康宣布推出采用世界最高数值孔径镜头的新系统
2004 年 2 月 23 日
系统将用于 65 nm 或更小的器件
加利福尼亚州贝尔蒙特，2004 年 2 月 23 日 – 尼康公司今天推出了 NSR-S308F，这是一款先进的 ArF 扫描仪，具有世界上最高的 0.92 NA 投影镜头，适用于大规模生产 65 nm 和更小的设备。该系统将世界上最高 NA 的投影镜头与新开发的高生产率平台相结合，提高了分辨率，同时显著提高了吞吐量并降低了拥有成本。
尼康通过推出 NSR-S308F 继续扩大其领导地位。Nikon 在 2003 年推出了四款新的光刻系统，比任何竞争对手都多。2003 年，Nikon 还交付了比任何竞争对手都多的整体系统和更先进的 ArF 扫描仪。
NSR-308F 采用新开发的平台，可显著提高对准精度和吞吐量。对准精度降低到 8 nm 或更小，比尼康的上一代 ArF 扫描仪提高了 44%，而 300 mm 晶圆的吞吐量提高到每小时 140 片晶圆或更多，提高了约 25%。随着生产率的显著提高，该系统以更低的总体拥有成本提供下一代工艺功能。
为了确保尽可能高的图像质量，Nikon 利用其光学设计和制造专业知识开发了业界最高质量的投影镜头。高品质的材料和专有的制造技术提供了近乎完美的镜头。尼康的镜头因其高品质和耐用性而享誉业界。
“尼康是第一家为先进的 90 nm 设备生产提供 0.85 NA 镜头的公司，现在我们正在推出世界上最高的 0.92 NA 镜头，用于 65 nm 生产，”Nikon Precision， Inc. 首席执行官 Geoff Wild 表示。他继续说道：“我们将继续为客户提供他们需要的解决方案，以在竞争中保持技术优势。
关于尼康
自 1980 年以来，尼康公司一直在通过创新产品和技术彻底改变光刻技术。该公司是微电子制造行业光刻设备的全球领导者，在全球安装了 7,200 多套曝光系统。Nikon 提供业内最广泛的生产级步进机和扫描仪选择。这些产品服务于半导体、平板显示器 （LCD） 和薄膜磁头 （TFH） 行业。Nikon Precision Inc. 在北美为 Nikon 光刻设备提供服务、培训、应用和技术支持，以及销售和营销。
本新闻稿包含 1995 年《私人证券改革法案》中定义的前瞻性陈述，这些陈述受到已知和未知风险和不确定性的影响，可能导致实际结果与此类陈述中明示或暗示的结果存在重大差异。此类陈述受风险、不确定性和状况变化的影响，尤其是与行业要求和其他风险相关的陈述。公司不承担更新本新闻稿中信息的义务。
Nikon Announces New System with World’s Highest NA Lens
February 23, 2004
System will be used for 65 nm or smaller devices
Belmont, Calif., February 23, 2004 – Nikon Corporation introduced today the NSR-S308F, an advanced ArF scanner with the world’s highest NA projection lens of 0.92, targeted at mass production of 65 nm and smaller devices. The system combines the world’s highest NA projection lens with a newly developed, high productivity platform, which improves resolution while significantly increasing throughput and lowering the cost of ownership.
Nikon continues to extend its leadership position with the introduction of the NSR-S308F. Nikon introduced four new lithography systems in 2003, more than any of its competitors. Nikon also shipped more systems overall and more advanced ArF scanners than any of its competitors in 2003.
The NSR-308F has a newly developed platform that enables dramatic improvements in alignment accuracy and throughput. Alignment accuracy has been reduced to 8 nm or less, a 44% improvement over Nikon’s previous generation ArF scanner, while throughput was increased to 140 wafers or more per hour for 300 mm wafers, an improvement of approximately 25%. With this significant increase in productivity, the system delivers next-generation process capabilities at a lower overall cost of ownership.
To ensure the highest possible image quality, Nikon leveraged its optics design and manufacturing expertise to develop the industry’s highest quality projection lens. High quality materials and proprietary manufacturing technology provide a virtually perfect lens. Nikon’s lenses are recognized throughout the industry for their high quality and durability.
“Nikon was the first company to ship a 0.85 NA lens for advanced 90 nm device production and now we are introducing the world’s highest NA lens at 0.92 for 65 nm production” stated Geoff Wild CEO of Nikon Precision, Inc. He continued “We continue to provide our customers with the solutions they need to maintain a technological edge over their competition.”
About Nikon
Since 1980, Nikon Corporation has been revolutionizing lithography with innovative products and technologies. The company is a worldwide leader in lithography equipment for the microelectronics manufacturing industry with more than 7,200 exposure systems installed worldwide. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the semiconductor, flat panel display (LCD) and thin-film magnetic head (TFH) industries. Nikon Precision Inc. provides service, training, applications and technical support, as well as sales and marketing for Nikon lithography equipment in North America.
This press release contains forward-looking statements as that term is defined in the Private Securities Reform Act of 1995, which are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements. Such statements are subject to risks, uncertainties and changes in condition, particularly those related to industry requirements and other risks. The Company undertakes no obligation to update the information in this press release.
厂家名称
深圳市矢量科学仪器有限公司是集半导体仪器装备代理及技术服务的国家级高新技术企业。 致力于提供半导体前道制程工艺装备、后道封装装备、半导体分析测试设备、半导体光电测试仪表及相关仪器装备维护、保养、售后技术支持及实验室整体...